DIN 50451-6:2014-11 半導(dǎo)體技術(shù)材料的測試 液體中痕量元素的測定 第6部分:高純氟化銨溶液中36種元素的測定
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 6: Determination of 36 elements in a high-purity ammonium fluoride solution (NH<(Index)4>F) and in etching mixtures of high-purity ammonium ...