DIN 50451-2:2003-04
半導(dǎo)體技術(shù)材料的測(cè)試 - 液體中微量元素的測(cè)定 - 第 2 部分:鈣 (Ca)、鈷 (Co)、鉻 (Cr)、銅 (Cu)、鐵 (Fe)、鎳 (Ni) 和鋅 (Zn) )在氫氟酸中,采用等離子體誘導(dǎo)發(fā)射光譜...
Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 2: Calcium (Ca), cobalt (Co), chromium (Cr), copper (Cu), Iron (Fe), nickel (Ni) and zinc (Zn) in hydrofluoric acid with plasma-induced emission spect...